Photonics Research, Volume. 6, Issue 11, 1008(2018)

Accurate extraction of fabricated geometry using optical measurement

Yufei Xing1,2、*, Jiaxing Dong1,2, Sarvagya Dwivedi3, Umar Khan1,2, and Wim Bogaerts1,2
Author Affiliations
  • 1Photonics Research Group, Ghent University-IMEC, Ghent, Belgium
  • 2Center of Nano and Biophotonics, Ghent, Belgium
  • 3Electrical and Computer Engineering Department, University of California Santa Barbara, Santa Barbara, California 93106-9560, USA
  • show less
    References(21)

    [2] A. Ribeiro, S. Dwivedi, W. Bogaerts. A thermally tunable but athermal silicon MZI filter. 18th European Conference on Integrated Optics 2016 (ECIO)(2016).

    [12] T. Horikawa, D. Shimura, H. Takahashi, J. Ushida, Y. Sobu, A. Shiina, M. Tokushima, S.-H. Jeong, K. Kinoshita, T. Mogami. Extraction of SOI thickness deviation based on resonant wavelength analysis for silicon photonics devices. IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 10, 1-3(2017).

    [15] S. K. Selvaraja, E. Rosseel, L. Fernandez, M. Tabat, W. Bogaerts, J. Hautala, P. Absil. SOI thickness uniformity improvement using corrective etching for silicon nano-photonic device. IEEE International Conference on Group IV Photonics GFP, 71-73(2011).

    [16] S. K. Selvaraja. Wafer-Scale Fabrication Technology for Silicon Photonic Integrated Circuits(2011).

    [20] M. Fiers, T. Van Vaerenbergh, J. Dambre, P. Bienstman. CAPHE: time-domain and frequency-domain modeling of nonlinear optical components. Advanced Photonics Congress, IM2B.3(2012).

    Tools

    Get Citation

    Copy Citation Text

    Yufei Xing, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, Wim Bogaerts, "Accurate extraction of fabricated geometry using optical measurement," Photonics Res. 6, 1008 (2018)

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Silicon Photonics

    Received: Jul. 10, 2018

    Accepted: Sep. 5, 2018

    Published Online: Nov. 11, 2018

    The Author Email: Yufei Xing (yufei.xing@ugent.be)

    DOI:10.1364/PRJ.6.001008

    Topics