Photonics Research, Volume. 6, Issue 11, 1008(2018)
Accurate extraction of fabricated geometry using optical measurement
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Yufei Xing, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, Wim Bogaerts, "Accurate extraction of fabricated geometry using optical measurement," Photonics Res. 6, 1008 (2018)
Category: Silicon Photonics
Received: Jul. 10, 2018
Accepted: Sep. 5, 2018
Published Online: Nov. 11, 2018
The Author Email: Yufei Xing (yufei.xing@ugent.be)