Researching | Accurate extraction of fabricated geometry using optical measurement

Photonics Research, Volume. 6, Issue 11, 1008(2018)

Accurate extraction of fabricated geometry using optical measurement

Yufei Xing^1,2、*, Jiaxing Dong^1,2, Sarvagya Dwivedi³, Umar Khan^1,2, and Wim Bogaerts^1,2

Author Affiliations

¹Photonics Research Group, Ghent University-IMEC, Ghent, Belgium

²Center of Nano and Biophotonics, Ghent, Belgium

³Electrical and Computer Engineering Department, University of California Santa Barbara, Santa Barbara, California 93106-9560, USA

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Yufei Xing, Jiaxing Dong, Sarvagya Dwivedi, Umar Khan, Wim Bogaerts, "Accurate extraction of fabricated geometry using optical measurement," Photonics Res. 6, 1008 (2018)

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Paper Information

Category: Silicon Photonics

Received: Jul. 10, 2018

Accepted: Sep. 5, 2018

Published Online: Nov. 11, 2018

The Author Email: Yufei Xing (yufei.xing@ugent.be)

DOI:10.1364/PRJ.6.001008

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology