Suppression Method for Vibration Error in <i>Φ</i>600 mm Wavelength-Tuning Interferometer

Donghui Zheng; Lei Chen; Zhiyao Ma; Jinpeng Li; Chenhui Hu

doi:10.3788/AOS202242.2312005

Acta Optica Sinica, Volume. 42, Issue 23, 2312005(2022)

Suppression Method for Vibration Error in Φ600 mm Wavelength-Tuning Interferometer

Donghui Zheng^1、*, Lei Chen¹, Zhiyao Ma¹, Jinpeng Li², and Chenhui Hu¹

¹School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing 210094, Jiangsu , China

²CAS Nanjing Astronomical Instruments Co. Ltd., Nanjing 210042, Jiangsu , China

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Figures & Tables(12)

Fig. 1. I-P curves

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Fig. 2. Simulation phase-shifting interferograms. (a) Phase-shift of π/2; (b) phase-shift of π; (c) phase-shift of 3π/2; (d) phase-shift of 2π

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Fig. 3. Simulated I-P curve

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Fig. 4. Simulation results. (a) Initial phase; (b) result of PSI; (c) calculation result of vibration suppression method

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Fig. 5. Experimental setup of Φ600 mm plane interferometer

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Fig. 6. Experimental data. (a) One of interferograms; (b) I-P figure

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Fig. 7. Experimental results. (a) Phase calculated by PSI; (b) phase calculated by vibration suppression method

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Fig. 8. Effect of vibration suppression method. (a) Standard phase distribution; (b) deviation of PSI under vibration; (c) deviation of vibration suppression method

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Fig. 9. Suppression effect for nonuniformity interferograms. (a) Suppression effects under different nonuniformity; (b) I-P for one of interferogram; (c) residual error of vibration suppression method

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Table 1. Zernike coefficients of simulation wavefront
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Table 1. Zernike coefficients of simulation wavefront
Zernike polynomial Meaning Zernike coefficient Z_i
1 Piston 0.20
ρcos θ Tilt about x-axis 16.00
ρsin θ Tilt about y-axis 0
2ρ²-1 Focus 0.20
ρ²cos 2θ Astigmatism at 0° 0.10
ρ²sin 2θ Astigmatism at 45° 0.14

Table 2. Vibration suppression effects under different frequencies
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Table 2. Vibration suppression effects under different frequencies
$ω_{v}$ / $ω_{0}$ 0.5 1.0 2.0 3.0 5.0
ESC 277 17 12 17 17

Table 3. Vibration suppression effects under different amplitudes (vibration frequency is 2 times the phase shift frequency)
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Table 3. Vibration suppression effects under different amplitudes (vibration frequency is 2 times the phase shift frequency)
$ε$ / $r a d$ 0.5 1.0 2.0 3.0 5.0
ESC 7.6 12.0 19.0 26.0 34.0

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Donghui Zheng, Lei Chen, Zhiyao Ma, Jinpeng Li, Chenhui Hu. Suppression Method for Vibration Error in Φ600 mm Wavelength-Tuning Interferometer[J]. Acta Optica Sinica, 2022, 42(23): 2312005

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