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Acta Optica Sinica, Volume. 42, Issue 23, 2312005(2022)

Suppression Method for Vibration Error in Φ600 mm Wavelength-Tuning Interferometer

Donghui Zheng1、*, Lei Chen1, Zhiyao Ma1, Jinpeng Li2, and Chenhui Hu1
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing 210094, Jiangsu , China
  • 2CAS Nanjing Astronomical Instruments Co. Ltd., Nanjing 210042, Jiangsu , China
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    Donghui Zheng, Lei Chen, Zhiyao Ma, Jinpeng Li, Chenhui Hu. Suppression Method for Vibration Error in Φ600 mm Wavelength-Tuning Interferometer[J]. Acta Optica Sinica, 2022, 42(23): 2312005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 2, 2022

    Accepted: Jul. 28, 2022

    Published Online: Dec. 14, 2022

    The Author Email: Zheng Donghui (zdonghui@njust.edu.cn)

    DOI:10.3788/AOS202242.2312005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology