Researching | Reconstruction Method of Wafer Map Based on Parametric Surface

Acta Optica Sinica, Volume. 44, Issue 21, 2112002(2024)

Reconstruction Method of Wafer Map Based on Parametric Surface

Zhipeng Wu^1,2, Yuejing Qi^1,2、*, Dan Wang^1,2, Tianwei Xu¹, and Xin Zhou^1,2

Author Affiliations

¹Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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References(18)

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Zhipeng Wu, Yuejing Qi, Dan Wang, Tianwei Xu, Xin Zhou. Reconstruction Method of Wafer Map Based on Parametric Surface[J]. Acta Optica Sinica, 2024, 44(21): 2112002

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: May. 15, 2024

Accepted: Jul. 15, 2024

Published Online: Nov. 18, 2024

The Author Email: Qi Yuejing (Qiyuejing@ime.ac.cn)

DOI:10.3788/AOS241018

CSTR:32393.14.AOS241018

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology