Fig. 1. Cross section schematic of double-mesa SiC SACM APD

Fig. 2. Simulated electric field distributions of double mesa SiC SACM APD. (a) 2D electric field distribution; (b) 1D horizontal electrical field profile along line I marked in 2D electrical field profile; (c) 1D vertical electrical field profile along line II marked in 2D electrical field profile

Fig. 3. Current-voltage curves. (a) Current-voltage and gain curves of SiC SACM APD; (b) dark current curves of SiC SACM APD and SiC PIN APD

Fig. 4. Schematic diagram of passive quenching circuit

Fig. 5. Single photon detection performance curves. (a) DCR-overbias curves of SiC SACM APD and SiC PIN APD; (b) DCR-SPDE curve of SiC SACM APD

Fig. 6. Spectral response curve of SiC SACM APD at room temperature