Microelectronics, Volume. 55, Issue 1, 16(2025)

Simulation Study on Single Event Effects of Heavy Ion Incident Angle and LET on FinFET SRAM

ZHANG Qi1,2, YUE Suge1,2, ZHANG Yanlong1,2, YUAN Jingshuang1,2, ZHU Yongqin1,2, LI Tongde1,2, and WANG Liang1,2
Author Affiliations
  • 1Beijing Microelectronics Technology Institute, Beijing 100076, P. R. China
  • 2Laboratory of Science and Technology on Radiation-Hardened Integrated Circuits in CASC, Beijing 100076, P. R. China
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    References(15)

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    [5] [5] NARASIMHAM B, GUPTA S, REED D, et al. Scaling trends and bias dependence of the soft error rate of 16 nm and 7 nm FinFET SRAMs[C]//IEEE International Reliability Physics Symposium (IRPS). Burlingame, CA, USA. 2018: 4C.1-1-4C.1-4.

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    [7] [7] TAKEUCHI K, SAKAMOTO K, YUKUMATSU K, et al. Voltage dependence of single-event cross-sections of FinFET SRAMs for low LET condition[J]. IEEE Transactions on Nuclear Science, 2023, 70(8): 1755-1759.

    [8] [8] KOBAYASHI D, HIROSE K, SAKAMOTO K, et al. An SRAM SEU cross section curve physics model[J]. IEEE Transactions on Nuclear Science, 2022, 69(3): 232-240.

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    [10] [10] TAKAMI K, COMI Y, ABE SHIN et al. Characterizing SEU cross sections of 12- and 28-nm SRAMs for 6.0, 8.0, and 14.8 MeV neutrons[C]//IEEE International Reliability Physics Symposium (IRPS). Monterey, CA, USA. 2023: 1-6.

    [11] [11] ZHANG H, JIANG H, ASSIS T R, et al. Angular effects of heavy-ion strikes on single-event upset response of flip-flop designs in 16-nm bulk FinFET technology[J]. IEEE Transactions on Nuclear Science, 2017, 64(1): 491-496.

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    [13] [13] JIN X, TANG M, TU Q K, et al. TCAD simulation research on the influence of particle incidence conditions on single event charge sharing effect of 28 nm SRAM[J]. Electronics & Packaging, 2019.

    [14] [14] CHI Y Q, HUANG P C, SUN Q, et al. Characterization of single-event upsets induced by high-LET heavy ions in 16-nm bulk FinFET SRAMs[J]. IEEE Transactions on Nuclear Science, 2022, 69(5): 1176-1181.

    [15] [15] KATO T, HASHIMOTO M, MATSUYAMA H. Angular sensitivity of neutron-induced single-event upsets in 12-nm FinFET SRAMs with comparison to 20-nm planar SRAMs[J]. IEEE Transactions on Nuclear Science, 2020, 67(7): 1485-1493.

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    ZHANG Qi, YUE Suge, ZHANG Yanlong, YUAN Jingshuang, ZHU Yongqin, LI Tongde, WANG Liang. Simulation Study on Single Event Effects of Heavy Ion Incident Angle and LET on FinFET SRAM[J]. Microelectronics, 2025, 55(1): 16

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    Paper Information

    Special Issue:

    Received: Aug. 18, 2024

    Accepted: Jun. 19, 2025

    Published Online: Jun. 19, 2025

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.240287

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