Fig. 1. Schematic diagram of light spot distribution

Fig. 2. Moving heat source loading and moving probe temperature extraction in COMSOL

Fig. 3. Comparison of single channel in FOM and ROM at orders 6,12,16,32

Fig. 4. Errors of between FOM and ROM at orders 6,12,16,32

Fig. 5. Structural diagram of ADRC

Fig. 6. Comparison chart between fal function curve and bfal function curve

Fig. 7. ADRC step response curve comparison and local enlargement

Fig. 8. PID，ADRC，PSO-ADRC control system simulation results

Fig. 9. Temperature control results in the co-simulation environment of Simulink and COMSOL