Fig. 1. Extraction process of sample parameters to be measured based on LM algorithm

Fig. 2. Basic principle and physical map of the ellipsometer. (a) Basic principle; (b) physical map

Fig. 3. Structure of the PCRAM chip. (a) Block diagram of each module; (b) schematic diagram of T-type PCRAM unit array

Fig. 4. Structure of the TiW bottom electrode. (a) Schematic diagram of the morphology; (b) test results of the SEM

Fig. 5. Measured and optimal theoretical Stokes parameters of the TiW bottom electrode

Fig. 6. Structure of the first layer of GST holes. (a) Schematic diagram of the morphology; (b) test results of the SEM

Fig. 7. Measured and optimal theoretical Stokes parameters of the first layer GST pore structure