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Chinese Journal of Lasers, Volume. 47, Issue 12, 1204003(2020)

Effects of Mid-Spatial Frequency Surface Errors on the Illumination Field Uniformity of Off-Axis Illumination

Gong Shuang1,2, Yang Baoxi1,2、*, and Huang Huijie1,2
Author Affiliations
  • 1Laboratory of Information Optics and Opto-Electronics Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (17)
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    References (15)
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    Figures & Tables(17)
    Diagrams of illumination modes. (a) Circular; (b) annular; (c) dipole; (d) quadrupole

    Fig. 1. Diagrams of illumination modes. (a) Circular; (b) annular; (c) dipole; (d) quadrupole

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    Far field intensity distribution of DOE

    Fig. 2. Far field intensity distribution of DOE

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    Wavefront in the exit pupil and its PSF. (a) Wavefront in the exit pupil under circular mode; (b) wavefront in the exit pupil under dipole mode; (c)PSF with MSF errors under circular mode; (d) PSF with MSF errors under dipole mode

    Fig. 3. Wavefront in the exit pupil and its PSF. (a) Wavefront in the exit pupil under circular mode; (b) wavefront in the exit pupil under dipole mode; (c)PSF with MSF errors under circular mode; (d) PSF with MSF errors under dipole mode

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    Distribution of LSF under dipole mode

    Fig. 4. Distribution of LSF under dipole mode

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    Encircled energy for the LSF. (a) σ=0.2; (b) σ=0.8

    Fig. 5. Encircled energy for the LSF. (a) σ=0.2; (b) σ=0.8

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    Illustration of the effects of MSF surface errors on illumination field

    Fig. 6. Illustration of the effects of MSF surface errors on illumination field

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    Uniformity of illumination field versus PV value under different coherence factors

    Fig. 7. Uniformity of illumination field versus PV value under different coherence factors

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    Penumbra width versus PV value under different coherence factors

    Fig. 8. Penumbra width versus PV value under different coherence factors

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    Structure of relay lens group in photolithography illumination

    Fig. 9. Structure of relay lens group in photolithography illumination

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    Uniformity of illumination field created by simulation. (a) Ideal illumination field; (b) illumination field under the effects of MSF surface errors

    Fig. 10. Uniformity of illumination field created by simulation. (a) Ideal illumination field; (b) illumination field under the effects of MSF surface errors

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    Uniformity of illumination field versus PV value under different coherence factors

    Fig. 11. Uniformity of illumination field versus PV value under different coherence factors

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    Diagram of the effects of MSF surface errors on penumbra width

    Fig. 12. Diagram of the effects of MSF surface errors on penumbra width

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    Penumbra width versus PV value under different coherence factors

    Fig. 13. Penumbra width versus PV value under different coherence factors

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    Structure of surface errors. (a) Actually manufactured surface errors; (b) low-spatial frequency surface errors; (c) mid-spatial frequency surface errors

    Fig. 14. Structure of surface errors. (a) Actually manufactured surface errors; (b) low-spatial frequency surface errors; (c) mid-spatial frequency surface errors

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    • Table 1. Uniformity of illumination field under different PV values and coherence factors unit: %

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      Table 1. Uniformity of illumination field under different PV values and coherence factors unit: %

      PV valueλ/30λ/20λ/15λ/10
      Uniformity atσ=0.499.977599.977399.973799.9609
      Uniformity atσ=0.699.975099.966799.945999.9015
      Uniformity atσ=0.899.973099.958299.914799.8227

    • Table 2. Penumbra width under different PV and coherence factorsunit: mm

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      Table 2. Penumbra width under different PV and coherence factorsunit: mm

      PV valueλ/30λ/20λ/15λ/10
      Penumbra width atσ=0.40.01100.01100.02200.0980
      Penumbra width atσ=0.60.04400.05500.07700.1870
      Penumbra width atσ=0.80.11000.14300.16500.3301

    • Table 3. Uniformity of illumination field and penumbra width under different PV values and coherence factors

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      Table 3. Uniformity of illumination field and penumbra width under different PV values and coherence factors

      Coherence factor σ0.40.60.8
      Illumination fielduniformity /%99.817999.786399.6414
      Penumbra width /mm0.110.150.28
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    Gong Shuang, Yang Baoxi, Huang Huijie. Effects of Mid-Spatial Frequency Surface Errors on the Illumination Field Uniformity of Off-Axis Illumination[J]. Chinese Journal of Lasers, 2020, 47(12): 1204003

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    Paper Information

    Category: Measurement and metrology

    Received: Jun. 11, 2020

    Accepted: --

    Published Online: Dec. 31, 2020

    The Author Email: Yang Baoxi (yangbx@siom.ac.cn)

    DOI:10.3788/CJL202047.1204003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology