Effects of Mid-Spatial Frequency Surface Errors on the Illumination Field Uniformity of Off-Axis Illumination

Gong Shuang; Yang Baoxi; Huang Huijie

doi:10.3788/CJL202047.1204003

Chinese Journal of Lasers, Volume. 47, Issue 12, 1204003(2020)

Effects of Mid-Spatial Frequency Surface Errors on the Illumination Field Uniformity of Off-Axis Illumination

Gong Shuang^1,2, Yang Baoxi^1,2、*, and Huang Huijie^1,2

¹Laboratory of Information Optics and Opto-Electronics Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

show less

Abstract Get PDF(in Chinese)

Cited By

Article index updated: Sep. 7, 2025

The article is cited by 2 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

Gong Shuang, Yang Baoxi, Huang Huijie. Effects of Mid-Spatial Frequency Surface Errors on the Illumination Field Uniformity of Off-Axis Illumination[J]. Chinese Journal of Lasers, 2020, 47(12): 1204003

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Measurement and metrology

Received: Jun. 11, 2020

Accepted: --

Published Online: Dec. 31, 2020

The Author Email: Yang Baoxi (yangbx@siom.ac.cn)

DOI:10.3788/CJL202047.1204003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology