Infrared and Laser Engineering, Volume. 51, Issue 9, 20220500(2022)

High-precision profile measurement method for axisymmetric aspheric mirror (invited)

Xinrui Fan1,2, Xiaofei Diao3、*, Jianwei Wu1,2, and Yanhui Kang3
Author Affiliations
  • 1Institute of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China
  • 2Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China
  • 3National Institute of Metrology, Beijing 100029, China
  • show less
    References(19)

    [1] Chijuan Li, Changfeng Sun, Zhe Xi, et al. Application of optical aspheric element. Laser & Infrared, 43, 244-247(2013).

    [2] Zijian Liang, Yongying Yang, Hongyang Zhao, et al. Advances in research and applications of optical aspheric surface metrology. Chinese Optics, 15, 161-186(2022).

    [3] [3] Jia Lide. Study on key techniques of codinate measurement f optical aspherics[D]. Changsha: National University of Defense Technology, 2008. (in Chinese)

    [4] T G Mathia, P Pawlus, M Wieczorowski. Recent trends in surface metrology. Wear, 271, 494-508(2011).

    [5] [5] Hou Maosheng. Study on key techniques of profile measurement f large aperture optical aspherics[D]. Beijing: Beijing Institute of Technoloty, 2015. (in Chinese)

    [6] Shaodong Ping, Yunxia Fu, Feng Zhang, et al. Study on measurement method of mirror reflection laser tracking interferometric length measurement. Infrared and Laser Engineering, 50, 20210624(2021).

    [7] Xiaokun Wang. Measurement of large aspheric surface by stitching and coordinate measuring machine. Infrared and Laser Engineering, 43, 3410-3415(2014).

    [8] [8] Henselmans R. Noncontact measurement machine f freefm optics[D]. Eindhoven: Technische Universiteit Eindhoven, 2009.

    [9] [9] Berger G, Petter J. Noncontact metrology of aspheric surfaces based on MWLI technology [C]Proceedings of SPIEInternational Society f Optics Photonics, 2013, 8884: 88840V.

    [10] [10] Lang Zhiguo. Study on measuring large aperture aspheric surface technique based on ultraprecise rotary scanning[D]. Harbin: Harbin Institute of Technology, 2009. (in Chinese)

    [11] [11] Du Huilin. Research on key technologies of noncontact surface measurement f optical reflects[D]. Hangzhou: Zhejiang University, 2017. (in Chinese)

    [12] [12] Zhang Wenhao. Research on noncontact codinate metrology technology measurements of typical elements[D]. Hangzhou: Zhejiang University, 2019. (in Chinese)

    [13] Lin Han, Liang Mi, Xingbao Liu, et al. Measurement method of geometric error of coordinate measuring machine using laser tracer. Advanced Engineering Sciences, 53, 159-165(2021).

    [14] [14] Defisher S. Metrology f manufacturing of freefm optical surfaces with UltraSurf [C]Applied Industrial Optics: Spectroscopy, Imaging Metrology. Optica Publishing Group, 2015: JT5A. 6.

    [15] S Tereschenko, P Lehmann, L Zellmer, et al. Passive vibration compensation in scanning white-light interferometry. Applied Optics, 55, 6172(2016).

    [16] Junning Cui, Wei Li, Xingyuan Bian, et al. Homodyne quadrature laser interferometry measurement method for large amplitude, long cycle vibration calibration. Infrared and Laser Engineering, 50, 20200329(2021).

    [17] [17] Pintó A, Laguarta F, Artigas R, et al. Noncontact measurement of aspherical freefm optics with a new confocal tracking profiler [C]Proceedings of SPIEThe International Society f Optical Engineering, 2011, 8169: 81690V.

    [18] Y L Chen, W L Zhu, S Yang, et al. Large-area profile measurement of sinusoidal freeform surfaces using a new prototype scanning tunneling microscopy. Precision Engineering, 38, 414-420(2014).

    [20] [20] Fan Hongwei. Research on laser interferometer system f the fm stard measurement device[D]. Tianjin: Tianjin University, 2019. (in Chinese)

    CLP Journals

    [1] Zhaoming Wang, Mengjuan Li, Qiuyue Yu, Chunlin Li, Ziyue Zhao, Jinghua Wang, Tianbin Lv, Zhaojian Zhang, Changsuo Yu. Research on high precision testing method for mirror optical axis of two-sided community aspheric mirror (invited)[J]. Infrared and Laser Engineering, 2023, 52(9): 20230476

    Tools

    Get Citation

    Copy Citation Text

    Xinrui Fan, Xiaofei Diao, Jianwei Wu, Yanhui Kang. High-precision profile measurement method for axisymmetric aspheric mirror (invited)[J]. Infrared and Laser Engineering, 2022, 51(9): 20220500

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Jul. 21, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email: Diao Xiaofei (diaoxf@nim.ac.cn)

    DOI:10.3788/IRLA20220500

    Topics