Fig. 1. Schematic diagram of the optical probe normal tracking trajectory

Fig. 2. Schematic diagram of coordinate scanning device with separate metrology frames

Fig. 3. Schematic diagram of optical probe interference principle

Fig. 4. Positioning and measuring principle of scanning mechanism

Fig. 5. Non-contact scanning measurement device

Fig. 6. Image of reflector under test

Fig. 7. Measurement errors of ϕ25 mm standard ball

Fig. 8. Measurement standard deviation ofϕ25 mm standard ball

Fig. 9. Measurement errors of aspheric mirror

Fig. 10. Measurement standard deviation of aspheric mirror