Signal Enhancement Method of Defect Detection Based on Image Deblurring Algorithm

Qiang Wang; Zhinan Zeng

doi:10.3788/CJL240673

Chinese Journal of Lasers, Volume. 51, Issue 23, 2304003(2024)

Signal Enhancement Method of Defect Detection Based on Image Deblurring Algorithm

Qiang Wang^1,2 and Zhinan Zeng^2,3、*

Author Affiliations

¹School of Microelectronics, Shanghai University, Shanghai 201800, China

²State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

³Zhangjiang Laboratory, Shanghai 200120, China

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References(21)

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Qiang Wang, Zhinan Zeng. Signal Enhancement Method of Defect Detection Based on Image Deblurring Algorithm[J]. Chinese Journal of Lasers, 2024, 51(23): 2304003

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Paper Information

Category: Measurement and metrology

Received: Mar. 11, 2024

Accepted: May. 21, 2024

Published Online: Dec. 9, 2024

The Author Email: Zeng Zhinan (zhinan_zeng@mail.siom.ac.cn)

DOI:10.3788/CJL240673

CSTR:32183.14.CJL240673

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology