Fig. 1. (a) The circular scanning path; (b) The radial scanning path

Fig. 2. Schematic diagram of splicing measurement

Fig. 3. The principle of data compensation

Fig. 4. Simulation results of environmental error suppression method

Fig. 5. Schematic diagram of uniform circular path distribution

Fig. 6. Schematic diagram of experimental device

Fig. 7. Chromatic confocal probe with vertical adjustable mount

Fig. 8. The measured surface. (a) Nickel flat mirror with diameter of 60 mm; (b) Interferometer test results

Fig. 9. Shape error of circular path measurement

Fig. 10. Shape error after suppress environmental error

Fig. 11. Shape deviation before and after suppress

Fig. 12. Comparison of the RMS value of the surface shape before and after suppression