Infrared and Laser Engineering, Volume. 51, Issue 11, 20210144(2022)

High-precision optical measurement method based on discrete path and splicing

Zhengxiang Shen1,2, Xu Wang1,2, and Jun Yu1,2
Author Affiliations
  • 1Key Laboratory of Advanced Micro-Structure Materials, Ministry of Education, Tongji University, Shanghai 200092, China
  • 2Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
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    In the manufacturing of ultra-precision optical elements, high-precision optical detection technology is the key to further improve the optical processing accuracy and to characterize and evaluate the optical surface morphology. Non-contact optical detection method has been widely used because of its high efficiency and no damage detection. But the external environment disturbance can easily affect the optical probe and reduce the detection accuracy. Therefore, a method of discrete detection path and splicing is proposed in this paper. The traditional spiral path is divided into multi-circular and multi-path paths. The compensation of environmental disturbance error is realized by the data splicing between paths. The parameter setting of discrete detection path is analyzed, and a uniform distribution strategy of circular path is given. Finally, based on the optical detection platform, the verification experiment of the compensation method of environmental error is carried out. Compared with the uncompensated results, the measurement relative error is reduced from 24.3% to 4.3%.

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    Zhengxiang Shen, Xu Wang, Jun Yu. High-precision optical measurement method based on discrete path and splicing[J]. Infrared and Laser Engineering, 2022, 51(11): 20210144

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    Paper Information

    Category: Photoelectric measurement

    Received: Mar. 9, 2021

    Accepted: --

    Published Online: Feb. 9, 2023

    The Author Email:

    DOI:10.3788/IRLA20210144

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