Fig. 1. Block diagram of the cell micromanipulation system

Fig. 2. Design of the flexible parallel piezoelectric positioning stage

Fig. 3. Pseudo-rigid body model diagram of flexible parallel piezoelectric positioning stage

Fig. 4. Displacement diagram of moving platform

Fig. 5. Diagram of simplified 3-PRR kinematic chain

Fig. 6. Kinematic diagram of hinge

Fig. 7. Finite element simulation of positioning stage

Fig. 8. Workspace for flexible parallel piezo positioning stage

Fig. 9. Positioning stage test system

Fig. 10. Relationship between the output displacement and driving voltage of piezoelectric actuator

Fig. 11. Open-loop test results

Fig. 12. PID control programming diagram

Fig. 13. Closed-loop experimental testing results

Fig. 14. Trajectory tracking results