Optics and Precision Engineering, Volume. 33, Issue 2, 220(2025)
Design and experiments of a flexible parallel piezoelectric micro-positioning stage for cell micromanipulation
In order to achieve cell-level operations such as cell capture, cutting, separation, and injection, a flexible parallel piezoelectric positioning stage for biocellular engineering was designed, modeled, simulated, and tested in this paper. The positioning stage consisted of a moving platform, a base, a three-stage amplification mechanism, and three piezoelectric actuators. The displacements generated by the piezoelectric actuators were amplified by the three-stage amplification mechanism, and the precise movement of the positioning stage was realized through feedback control, so as to achieve the target positioning effect. In the design process, the pseudo-rigid-body method combined with the flexible hinge stiffness calculation model was adopted to analyze the kinematic statics of the mechanism. The Lagrange equation was used to establish the dynamics model of the designed flexible parallel piezoelectric positioning stage using the lumped mass method. After determining the structural parameters, finite element analysis was carried out to verify the derived theoretical model, and the simulation results showed that the error between the theoretical and simulation models was less than 10%, and the mechanism was able to achieve a large stroke as well as a higher frequency of motion. In addition, a prototype system for the flexible parallel piezoelectric positioning stage was also built and experimentally tested to evaluate its open and closed loop performance. The experimental results show that the designed positioning stage has a working stroke of 125 μm×126 μm, the natural frequencies in the X-direction and Y-direction are 128.9 Hz and 132.8 Hz, and the corresponding motion resolution are both better than 400 nm, respectively.
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Shengzheng KANG, Haowen WANG. Design and experiments of a flexible parallel piezoelectric micro-positioning stage for cell micromanipulation[J]. Optics and Precision Engineering, 2025, 33(2): 220
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Received: Oct. 22, 2024
Accepted: --
Published Online: Apr. 30, 2025
The Author Email: Shengzheng KANG (kangsz@nuist.edu.cn)