Fig. 1. Equipment appearance diagram and DMD imaging optical path schematic diagram. (a) Appearance diagram; (b) schematic diagram of imaging optical path

Fig. 2. Schematic diagram of the incident light on DMD

Fig. 3. Blazing level curves of DLP9000 and DLP9500. (a) DLP9000; (b) DLP9500

Fig. 4. The DLP9000 blazing level curves under different micromirror angles and the diffraction spot power distribution of the same model DMD chip. (a) Blazing level curve; (b) diffraction spot power distribution

Fig. 5. Diffraction spot in the Fourier plane and image pattern in the image plane. (a) Distribution of diffraction spot @d=7.56 μm; (b) distribution of diffraction spot @d=10.8 μm; (c) image pattern @d=7.56 μm;(d) image pattern @d=10.8 μm

Fig. 6. Processing diagram of the DMD diffraction model

Fig. 7. Diffraction spot distribution and image quality map of DLP9000. (a) Before adjusting the angle; (b) after adjusting the angle; (c) before adjusting the angle; (d) after adjusting the angle

Fig. 8. Exposure patterns of different image contrast. (a) Exposure pattern of Fig.7(a); (b) exposure pattern of Fig.7(b)