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Acta Optica Sinica, Volume. 20, Issue 12, 1675(2000)

X-Ray Inteferometry for Pitch Nanometer Measurement of SPM Master

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]3, [in Chinese]3, and [in Chinese]3
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  • 3[in Chinese]
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    [1] [1] Mendez J, Gomez-Herrcro J, Pasc J I et a/.. Diffusion of atom on Au(111) by the electric field gradient in scanning tunneling microscopy. J. Vacuum Science & Technology ( B ), 1996, 14(2):1145～1148

    [2] [2] Authier A, Lagomarsino S, Tanner B K. X-ray and neutron dynamical diffraction theory and applications. New York and London: Plenum Press. 1996. 370～372

    CLP Journals

    [1] Zhou Shaolin, Yang Yong, Chen Wangfu, Yan Wei, Ma Ping, Jiang Wenbo, Hu Song, Tang Xiaoping. Dual-Grating-Based Nanometer Measurement[J]. Acta Optica Sinica, 2009, 29(3): 702

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. X-Ray Inteferometry for Pitch Nanometer Measurement of SPM Master[J]. Acta Optica Sinica, 2000, 20(12): 1675

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 25, 1999

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology