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Acta Optica Sinica, Volume. 20, Issue 12, 1675(2000)

X-Ray Inteferometry for Pitch Nanometer Measurement of SPM Master

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]3, [in Chinese]3, and [in Chinese]3
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. X-Ray Inteferometry for Pitch Nanometer Measurement of SPM Master[J]. Acta Optica Sinica, 2000, 20(12): 1675

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 25, 1999

    Accepted: --

    Published Online: Aug. 9, 2006

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology