Optics and Precision Engineering, Volume. 19, Issue 4, 754(2011)

Micro energy director array for ultrasonic precise sealing of polymer MEMS device

LUO Yi1、*, ZHANG Miao-miao2, SUN Yi-bo2, and WANG Xiao-dong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    LUO Yi, ZHANG Miao-miao, SUN Yi-bo, WANG Xiao-dong. Micro energy director array for ultrasonic precise sealing of polymer MEMS device[J]. Optics and Precision Engineering, 2011, 19(4): 754

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    Paper Information

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    Received: Aug. 31, 2010

    Accepted: --

    Published Online: Jun. 14, 2011

    The Author Email: LUO Yi (luoy@dlut.edu.cn)

    DOI:10.3788/ope.20111904.0754

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