Optics and Precision Engineering, Volume. 19, Issue 4, 754(2011)
Micro energy director array for ultrasonic precise sealing of polymer MEMS device
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LUO Yi, ZHANG Miao-miao, SUN Yi-bo, WANG Xiao-dong. Micro energy director array for ultrasonic precise sealing of polymer MEMS device[J]. Optics and Precision Engineering, 2011, 19(4): 754
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Received: Aug. 31, 2010
Accepted: --
Published Online: Jun. 14, 2011
The Author Email: LUO Yi (luoy@dlut.edu.cn)
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