Chinese Journal of Lasers, Volume. 14, Issue 4, 225(1987)

Amorphous Si: H film grown by laser plasma induced chemical vapour deposition

Li Zhaolin, Zhang Zebo, Hong Xichun, Zhao Yuying, and Wang Tianjuan
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    Li Zhaolin, Zhang Zebo, Hong Xichun, Zhao Yuying, Wang Tianjuan. Amorphous Si: H film grown by laser plasma induced chemical vapour deposition[J]. Chinese Journal of Lasers, 1987, 14(4): 225

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    Paper Information

    Category: laser devices and laser physics

    Received: Feb. 13, 1986

    Accepted: --

    Published Online: Aug. 10, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

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