[1] Fu X Y, Hu L, Zhou Z J et al. Two-way time comparison of high-precision and long-distance optical fiber based on single photon detection[J]. Acta Optica Sinica, 43, 1306004(2023).

[2] Fu S, Tian X R, Yang J et al. Laser velocimetry based on single-photon array camera[J]. Laser & Optoelectronics Progress, 60, 0811023(2023).

[3] Yi R Q, Wang Y, Cao Z X et al. Design and verification of single-photon avalanche diode with high gain at low overbias voltage[J]. Acta Optica Sinica, 43, 2313001(2023).

[4] Wang S K, Liu D L, Chen Q Y et al. Silicon-based high-sensitivity near-infrared single-photon dTOF detector[J]. Acta Optica Sinica, 43, 2004002(2023).

[5] Cao Z X, Zeng M L, Yang J et al. Detection probability model and verification of an improved single photon avalanche diode[J]. Acta Optica Sinica, 43, 1025002(2023).

[6] Li Z, Liu D L, Dong J et al. A P-I-N structure single-photon avalanche diode detector with low dark count rate[J]. Acta Optica Sinica, 44, 0904001(2024).

[7] Ito K, Otake Y, Kitano Y et al. A back illuminated 10 μm SPAD pixel array comprising full trench isolation and Cu—Cu bonding with over 14% PDE at 940 nm[C]. 16, 4-18(2020).

[8] Fujisaki Y, Tsugawa H, Sakai K et al. A back-illuminated 6 μm SPAD depth sensor with PDE 36.5% at 940 nm via combination of dual diffraction structure and 2×2 on-chip lens[C], 11-16(2023).

[9] Zhang C, Zhang N, Ma Z J et al. A 240×160 3D-stacked SPAD dToF image sensor with rolling shutter and in-pixel histogram for mobile devices[J]. IEEE Open Journal of the Solid-State Circuits Society, 2, 3-11(2021).

[10] Hook T B, Brown J, Cottrell P et al. Lateral ion implant straggle and mask proximity effect[J]. IEEE Transactions on Electron Devices, 50, 1946-1951(2003).

[11] Arlt J, Tyndall D, Rae B R et al. A study of pile-up in integrated time-correlated single photon counting systems[J]. Review of Scientific Instruments, 84, 103105(2013).