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Acta Optica Sinica, Volume. 18, Issue 6, 757(1998)

A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography

[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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  • 2[in Chinese]
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    [1] [1] C. J. R. Sheppard,(ed. by H. Ohzu, S. Komatsu). Progress in confocal microscopy and its application. The 3rd International Conference on Optics Within Life Sciences-OWLS Ⅲ, Publ. by Else vier Science B. V. in Amsterdam,1994: 91～94

    [2] [2] G. Q. Xiao, T. R. Corle, G. S. Kino. Real time confocal scanning optical microscope. Appl. Phys. Lett., 1988, 53(8): 716～718

    [3] [3] H. J. Tiziani, H. M. Uhde. Three-dimension alanalysis by a microlens-array confocal arrangement. Appl. Opt., 1994, 33(4): 567～572

    [4] [4] H. J. Tiziani, R. Achi, R. N. Kramen et al.. Theoretical analysis of confocal microscopy with microlenses. Appl. Opt., 1996, 35(1): 120～125

    [6] [6] W. J. Tian, J. W. Yang, Z. K. Bao et al.. New method for measuring the properties of optical systems with microoptic components. Proc. SPIE, 1996, 2899: 263～268

    [7] [7] C. J. R. Sheppard, H. J. Matthews. The extended-focus, auto-focus and surface-profiling techniques of confocal microscopy. J. Mod. Opt., 1988, 35(1): 145～154

    [8] [8] T. D. Doukoglou, I. W. Hunter. Spherical-coddinate scanning confocal laser microscope. Opt. Eng., 1995, 34(7): 2103～2108

    [9] [9] T. Wilson, A. R. Carlini. Size of the detector in confocal imaging systems. Opt. Lett., 1987, 12(4): 227～229

    CLP Journals

    [1] Jiang Qin, Qiu Lirong, Zhao Weiqian, Sha Dingguo. Effect of Point Detector Position in Dual-Axes Confocal Microscopy[J]. Laser & Optoelectronics Progress, 2010, 47(8): 81201

    [2] YU Xiao-fen, YU Qing, LIU Wen-wen, WANG Yong-hong. Parallel Confocal Microscopy Detection with Digital Micromirror Device[J]. Opto-Electronic Engineering, 2010, 37(9): 58

    [3] Tu Long, Yu Jin, Fan Zhongwei, Bian Qiang, Ge Wenqi, Liu Yang, Zhang Xue, Huang Ke, Nie Shuzhen, Li Han, Mo Zeqiang. Parallel Confocal Microscopic Detection Technique and Its Research Progress[J]. Laser & Optoelectronics Progress, 2012, 49(8): 80006

    [4] Yu Qing, Yu Xiaofen, Liu Wenwen, Cheng Lingli. Re-Studies on Parallel Confocal Measurement System with Digital Micromirror Device[J]. Acta Optica Sinica, 2011, 31(5): 523005

    [5] Yu Qing, Yu Xiaofen, Bi Meihua. Research on High-Precision Acquisitive Method of Surface Coordinate Information Based on Parallel Confocal Microscopy[J]. Acta Optica Sinica, 2009, 29(11): 3057

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography[J]. Acta Optica Sinica, 1998, 18(6): 757

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 5, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

    The Author Email:

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology