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Acta Optica Sinica, Volume. 18, Issue 6, 757(1998)

A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography

[in Chinese]1, [in Chinese]1, [in Chinese]2, [in Chinese]2, and [in Chinese]2
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  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography[J]. Acta Optica Sinica, 1998, 18(6): 757

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Mar. 5, 1997

    Accepted: --

    Published Online: Oct. 18, 2006

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology