Influence of D. C. Reactive Magnetron Sputtering Conditions on the Preferred Orientation and N/Ti Ratio of TiN Films Coated on Glass

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ZHAO Qing-nan, ZHAO Xiu-jian. Influence of D. C. Reactive Magnetron Sputtering Conditions on the Preferred Orientation and N/Ti Ratio of TiN Films Coated on Glass[J]. Chinese Journal of Lasers, 2002, 29(s1): 503

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Paper Information

Category: laser devices and laser physics

Received: --

Accepted: --

Published Online: Feb. 23, 2013

The Author Email:

DOI:

CSTR:32186.14.

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology