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Chinese Journal of Lasers, Volume. 29, Issue s1, 503(2002)

Influence of D. C. Reactive Magnetron Sputtering Conditions on the Preferred Orientation and N/Ti Ratio of TiN Films Coated on Glass

ZHAO Qing-nan1,2 and ZHAO Xiu-jian1
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    ZHAO Qing-nan, ZHAO Xiu-jian. Influence of D. C. Reactive Magnetron Sputtering Conditions on the Preferred Orientation and N/Ti Ratio of TiN Films Coated on Glass[J]. Chinese Journal of Lasers, 2002, 29(s1): 503

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    Paper Information

    Category: laser devices and laser physics

    Received: --

    Accepted: --

    Published Online: Feb. 23, 2013

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology