Opto-Electronic Engineering, Volume. 35, Issue 7, 84(2008)

Profilometer Based on Interferometry and Micro Vision System

WANG Hai-shan1,2、*, SHI Tie-lin1,2, LIAO Guang-lan1,2, LIU Shi-yuan1,2, and ZHANG Wen-dong3
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    WANG Hai-shan, SHI Tie-lin, LIAO Guang-lan, LIU Shi-yuan, ZHANG Wen-dong. Profilometer Based on Interferometry and Micro Vision System[J]. Opto-Electronic Engineering, 2008, 35(7): 84

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    Paper Information

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    Received: Oct. 11, 2007

    Accepted: --

    Published Online: Mar. 1, 2010

    The Author Email: Hai-shan WANG (tomcatttt@163.com)

    DOI:

    CSTR:32186.14.

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