A profilometer was developed for micro-nano structure profile testing on the basis of interferometry and micro vision system. A Linik interferometer was adopted in this profilometer, in which the scanner and the phase shifter were integrated through scanning the reference mirror. The five-step phase-shift algorithm was selected for Phase Shift Interferometry (PSI) mode and the Squared-Envelope function estimation by Sampling Theory (SEST) algorithm was selected for Vertical Scanning Interferometry (VSI) mode. The experiments that used a standard multi-indents structure and a standard step structure to test PSI mode and VSI mode respectively verified that the profilometer could measure the profile of the micro-nano structure quickly and accurately, and be applied in the measurement of micro-electronics and micro electronic mechanic system.