Laser Technology, Volume. 43, Issue 6, 741(2019)
Non-contact thickness measurement of optical elements based on astigmatism
[1] [1] DONADELLO S, MOTTA M, DEMIR A G, et al. Monitoring of laser metal deposition height by means of coaxial laser triangulation[J]. Optics and Lasers in Engineering, 2019, 112: 136-144.
[2] [2] XIONG Zh Y, ZHAO B. Design of a new laser thickness measurement instrument[J]. Laser Technology, 2011, 35(5):614-617(in Chinese).
[3] [3] DISAWAL R, PRAKASH S. Measurement of displacement using phase shifted wedge plate lateral shearing interferometry[J]. Optics and Laser Technology, 2016, 77: 64-71.
[4] [4] KUMAR Y P, CHATTERJEE S. Step height measurement using lateral shearing cyclic path optical configuration setup and polarization phase-shifting interferometry[J]. Optical Engineering, 2012, 51(2): 023601.
[5] [5] YANG Sh M, ZHANG G F. A review of interferometry for geometric measurement[J]. Measurement Science and Technology, 2018, 29(10):102001.
[6] [6] ZHAO W Q, SUN R D, QIU L R, et al. Lenses axial space ray tracing measurement[J]. Optics Express, 2010, 18(4): 3608-3617.
[7] [7] ZHAO W Q, LIU W L, DING X, et al. Measurement method and apparatus for central lens thickness by confocal technique: China, CN101788271A[P]. 2010-03-17(in Chinese).
[8] [8] SHI L B, QIU L R, WANG Y, et al. Development of lens central thickness measurement system using laser differential confocal microscopy[J]. Chinese Journal of Scientific Instrument, 2012, 33(3): 683-688(in Chinese).
[9] [9] ZHENG Q, CHEN L, HAN Zh G, et al. A non-contact distance sensor with spectrally-spatially resolved white light interferometry[J]. Optics Communications, 2018, 424: 145-153.
[10] [10] KIM M G, PAHK H J. Fast and reliable measurement of thin film thickness profile based on wavelet transform in spectrally resolved white-light interferometry[J]. International Journal of Precision Engineering and Manufacturing, 2018, 19(2): 213-219.
[11] [11] YAO H B, LI L L, CHEN M M, et al. Design of measurement system of lens center thickness based on double-side optical confocal technology[J]. Laser Technology, 2016, 40(6): 912-915(in Chinese).
[12] [12] YU Q, ZHANG K, CUI Ch C, et al. Method of thickness measurement for transparent specimens with chromatic confocal microscopy[J]. Applied Optics, 2018, 57(33): 9722-9728.
[13] [13] CHEN L C, NGUYEN D T, CHANG Y W. Precise optical surface profilometry using innovative chromatic differential confocal microscopy[J]. Optics Letters, 2016, 41(24): 5660-5663.
[14] [14] ZHUO G Y, HSU C H, WANG Y H, et al. Chromatic confocal microscopy to rapidly reveal nanoscale surface/interface topography by position-sensitive detection[J]. Applied Physics Letters, 2018, 113(8): 083106.
[15] [15] HUANG B, WANG W Q, BATES M, et al. Three-dimensional super-resolution imaging by stochastic optical reconstruction microscopy[J]. Science, 2008, 319(5864): 810-813.
[16] [16] ICHIKAWA Y, YAMAMOTO K, MOTOSUKE M. Three-dimensional flow velocity and wall shear stress distribution measurement on a micropillar-arrayed surface using astigmatism PTV to understand the influence of microstructures on the flow field[J]. Microfluidics and Nanofluidics, 2018, 22(7): 73.
[17] [17] FUCHS T, HAIN R, KAHLER C J. Macroscopic three-dimensional particle location using stereoscopic imaging and astigmatic aberrations[J]. Optics Letters, 2014, 39(24): 6863-6866.
[18] [18] FUCHS T, HAIN R, KAHLER C J. Three-dimensional location of micrometer-sized particles in macroscopic domains using astigmatic aberrations[J]. Optics Letters, 2014, 39(5): 1298-1301.
[19] [19] LIU Zh P, SPEETJENS M F M, FRIJNS A J H, et al. Application of astigmatism mu-PTV to analyze the vortex structure of AC electroosmotic flows[J]. Microfluidics and Nanofluidics, 2014, 16(3): 553-569.
[20] [20] CIERPKA C, ROSSI M, SEGURA R, et al. A comparative analysis of the uncertainty of astigmatism-mu PTV, stereo-mu PIV, and mu PIV[J]. Experiments in Fluids, 2012, 52(3): 605-615.
Get Citation
Copy Citation Text
LI Xiaoxiao, ZHANG Zhiheng, ZHANG Xiaoyu, CAO Jiejun, CAO Zhaolou. Non-contact thickness measurement of optical elements based on astigmatism[J]. Laser Technology, 2019, 43(6): 741
Category:
Received: Jan. 13, 2019
Accepted: --
Published Online: Dec. 8, 2019
The Author Email: CAO Zhaolou (zhaolou.cao@gmail.com)