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Laser Technology, Volume. 43, Issue 6, 741(2019)

Non-contact thickness measurement of optical elements based on astigmatism

LI Xiaoxiao1,2, ZHANG Zhiheng1,2, ZHANG Xiaoyu1,2, CAO Jiejun1,2, and CAO Zhaolou1,2、*
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    LI Xiaoxiao, ZHANG Zhiheng, ZHANG Xiaoyu, CAO Jiejun, CAO Zhaolou. Non-contact thickness measurement of optical elements based on astigmatism[J]. Laser Technology, 2019, 43(6): 741

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    Received: Jan. 13, 2019

    Accepted: --

    Published Online: Dec. 8, 2019

    The Author Email: CAO Zhaolou (zhaolou.cao@gmail.com)

    DOI:10.7510/jgjs.issn.1001-3806.2019.06.002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology