[1] Fan P, Bai B, Long J. et al. Broadband high-performance infrared antireflection nanowires facilely grown on ultrafast laser structured Cu surface[J]. Nano Letters, 15, 5988-5994(2015). http://europepmc.org/abstract/MED/26280305

[2] Long J, Pan L, Fan P. et al. Cassie-state stability of metallic superhydrophobic surfaces with various micro/nanostructures produced by a femtosecond laser[J]. Langmuir, 32, 1065-1072(2016). http://europepmc.org/abstract/MED/26745154

[3] Joglekar A P, Liu H, Meyhöfer E. et al. Optics at critical intensity: Applications to nanomorphing[J]. Proceedings of the National Academy of Sciences of the United States of America, 101, 5856-5861(2004). http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=VIRT05000003000005000096000001&idtype=cvips&gifs=Yes

[4] Kawata S, Sun H B, Tanaka T. et al. Finer features for functional microdevices[J]. Nature, 412, 697-698(2001). http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=VIRT01000004000009000030000001&idtype=cvips&gifs=Yes

[5] Wu D, Wu S Z, Niu L G. et al. High numerical aperture microlens arrays of close packing[J]. Applied Physics Letters, 97, 031109(2010). http://scitation.aip.org/content/aip/journal/apl/97/3/10.1063/1.3464979

[6] Xia H, Wang J, Tian Y. et al. Ferrofluids for fabrication of remotely controllable micro-nanomachines by two-photon polymerization[J]. Advanced Materials, 22, 3204-3207(2010). http://europepmc.org/abstract/MED/20603886

[7] Sugioka K, Cheng Y. Ultrafast lasers-reliable tools for advanced materials processing[J]. Light: Science & Applications, 3, e149(2014). http://www.researchgate.net/publication/261634875_REVIEW_Ultrafast_lasersreliable_tools_for_advanced_materials_processing

[8] Cheng J, Liu C, Shang S. et al. A review of ultrafast laser materials micromachining[J]. Optics & Laser Technology, 46, 88-102(2013). http://www.sciencedirect.com/science/article/pii/S0030399212003064

[9] Sun L, Qin Y, Cao Q. et al. Novel photocatalytic antibacterial activity of TiO2 microspheres exposing 100% reactive {111} facets[J]. Chemical Communications, 47, 12628-12630(2011).

[10] Wang H, Gao J, Guo T. et al. Facile synthesis of AgBr nanoplates with exposed {111} facets and enhanced photocatalytic properties[J]. Chemical Communications, 48, 275-277(2012). http://www.ncbi.nlm.nih.gov/pubmed/22105717/

[11] Kwak D, Kim J, Park S. et al. Why is (111) silicon a better mechanical material for MEMS: Torsion case[C]. ASME 2003 International Mechanical Engineering Congress and Exposition, 259-264(2003).

[12] Hua X S, Zhang Y J, Wang H W. The effect of texture unit shape on silicon surface on the absorption properties[J]. Solar Energy Materials and Solar Cells, 94, 258-262(2010). http://www.sciencedirect.com/science/article/pii/S0927024809003298

[13] Pal P, Sato K. A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching[J]. Micro and Nano Systems Letters, 3, 1-42(2015). http://link.springer.com/article/10.1186/s40486-015-0012-4

[14] Römer G, Huis A J, Meijer J. et al. On the formation of laser induced self-organizing nanostructures[J]. CIRP Annals-Manufacturing Technology, 58, 201-204(2009). http://www.sciencedirect.com/science/article/pii/S0007850609000808

[15] Crawford T H R, Botton G A, Haugen H K. Crystalline orientation effects on conical structure formation in femtosecond laser irradiation of silicon and germanium[J]. Applied Surface Science, 256, 1749-1755(2010). http://www.sciencedirect.com/science/article/pii/S0169433209014147

[16] Sedao X, Maurice C, Garrelie F. et al. Influence of crystal orientation on the formation of femtosecond laser-induced periodic surface structures and lattice defects accumulation[J]. Applied Physics Letters, 104, 171605(2014). http://scitation.aip.org/content/aip/journal/apl/104/17/10.1063/1.4874626

[17] Krüger J, Kautek W. Ultrashort pulse laser interaction with dielectrics and polymers[M]. Berlin: Springer Berlin Heidelberg, 247-290(2004).

[18] Wright S I, Nowell M M. EBSD image quality mapping[J]. Microscopy and Microanalysis, 12, 72-84(2006).

[19] Gimpel T, Höger I, Falk F. et al. Electron backscatter diffraction on femtosecond laser sulfur hyperdoped silicon[J]. Applied Physics Letters, 101, 111911(2012). http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6304854

[20] Kaiser A, Rethfeld B, Vicanek M. et al. Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses[J]. Physical Review B, 61, 11437(2000). http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=PRBMDO000061000017011437000001&idtype=cvips&gifs=Yes

[21] Kiani A, Venkatakrishnan K, Tan B. Micro/nano scale amorphization of silicon by femtosecond laser irradiation[J]. Optics Express, 17, 16518-16526(2009). http://www.opticsinfobase.org/oe/abstract.cfm?uri=oe-17-19-16518

[22] Jia J, Li M, Thompson C V. Amorphization of silicon by femtosecond laser pulses[J]. Applied Physics Letters, 84, 3205-3207(2004). http://scitation.aip.org/content/aip/journal/apl/84/16/10.1063/1.1719280

[23] Kiani A, Venkatakrishnan K, Tan B. Direct laser writing of amorphous silicon on Si-substrate induced by high repetition femtosecond pulses[J]. Journal of Applied Physics, 108, 074907(2010). http://scitation.aip.org/content/aip/journal/jap/108/7/10.1063/1.3493192

[24] Saring P, Baumann A L, Kontermann S. et al. Characterization of electrical contacts on silicon (100) after ablation and sulfur doping by femtosecond laser pulses[C]. Solid State Phenomena, 205, 358-363(2014).