High Power Laser and Particle Beams, Volume. 35, Issue 9, 091002(2023)

Error-sensitive factors analysis and verification for optical element in-situ measurement device based on phase measuring deflectometry

Shanshan Wang1, Feng Shi2、*, Shuo Qiao2, Bowen Xu1, Qun Hao1,3, Ci Song2, Guipeng Tie2, Ye Tian2, Dede Zhai2, and Xing Peng2
Author Affiliations
  • 1Beijing Key Laboratory for Precision Optoelectronic Measurement Instrument and Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
  • 2College of Intelligence Science, National University of Defense Technology, Changsha 410073, China
  • 3School of Opto-Electronic Engineering, Changchun University of Science and Technology, Changchun 130022, China
  • show less
    References(19)

    [2] Hou Xi, Zhang Shuai, Hu Xiaochuan, . The research progress of surface interferometric measurement with higher accuracy[J]. Opto-Electronic Engineering, 47, 200209(2020).

    [5] [5] Berger G, Petter J. Noncontact metrology of aspheric surfaces based on MWLI technology[C]Proceedings of SPIE 8884, Optifab 2013. 2013: 88840V.

    [6] [6] erson D S, Burge J H. Swingarm profilometry of aspherics[C]Proceedings of SPIE 2536, Optical Manufacturing Testing. 1995: 169179.

    [7] [7] Wan Xinjun, Bin Boyi, Xie Shuping, et al. Development of an integrated freefm optics measurement system based on phase measuring deflectometry[C]Proceedings of SPIE 10847, Optical Precision Manufacturing, Testing, Applications. 2018: 1084710.

    [8] Guo Chunfeng, Hu Anduo. Three-dimensional shape measurement of aspheric mirrors with null phase measuring deflectometry[J]. Optical Engineering, 58, 104102(2019).

    [13] [13] Huang Lei, Ng C, Asundi A K. Dynamic 3D measurement f specular reflecting surface with monoscopic fringe reflection deflectometry[C]Proceedings of the Computational Optical Sensing Imaging 2011. 2011: CWC3.

    [16] Chen Zhenyi, Zhao Wenchuan, Zhang Qican, . Shape measurement of stressed mirror based on stereoscopic phase measuring deflectometry[J]. Opto-Electronic Engineering, 47, 190435(2020).

    [17] [17] Su Peng, Khreishi M, Huang Run, et al. Precision aspheric optics testing with SCOTS: a deflectometry approach[C]Proceedings of SPIE 8788, Optical Measurement Systems f Industrial Inspection VIII. 2013: 87881E.

    [18] [18] Faber C, Olesch E, Krobot R, et al. Deflectometry challenges interferometry: the competition gets tougher![C]Proceedings of SPIE 8493, Interferometry XVI: Techniques Analysis. 2012: 84930R.

    Tools

    Get Citation

    Copy Citation Text

    Shanshan Wang, Feng Shi, Shuo Qiao, Bowen Xu, Qun Hao, Ci Song, Guipeng Tie, Ye Tian, Dede Zhai, Xing Peng. Error-sensitive factors analysis and verification for optical element in-situ measurement device based on phase measuring deflectometry[J]. High Power Laser and Particle Beams, 2023, 35(9): 091002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Laser Damage of Optical Elements

    Received: Nov. 30, 2022

    Accepted: May. 27, 2023

    Published Online: Oct. 17, 2023

    The Author Email: Shi Feng (shifeng@nudt.edu.cn)

    DOI:10.11884/HPLPB202335.220405

    Topics