Review on Wet Etching Technique of Fused Silica Optical Elements

Yuhan Li; Huapan Xiao; Hairong Wang; Xiaoya Liang; Changpeng Li; Xin Ye; Xiaodong Jiang; Xinxiang Miao; Caizhen Yao; Laixi Sun

doi:10.3788/LOP202158.1516026

Laser & Optoelectronics Progress, Volume. 58, Issue 15, 1516026(2021)

Review on Wet Etching Technique of Fused Silica Optical Elements

Yuhan Li¹, Huapan Xiao², Hairong Wang^1、*, Xiaoya Liang¹, Changpeng Li³, Xin Ye^3、**, Xiaodong Jiang³, Xinxiang Miao³, Caizhen Yao³, and Laixi Sun³

Author Affiliations

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an , Shaanxi 710049, China

²College of Mechanical Engineering, Chongqing University, Chongqing 400044, China

³Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang , Sichuan 621900, China

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Yuhan Li, Huapan Xiao, Hairong Wang, Xiaoya Liang, Changpeng Li, Xin Ye, Xiaodong Jiang, Xinxiang Miao, Caizhen Yao, Laixi Sun. Review on Wet Etching Technique of Fused Silica Optical Elements[J]. Laser & Optoelectronics Progress, 2021, 58(15): 1516026

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Paper Information

Category: Materials

Received: Dec. 17, 2020

Accepted: Feb. 4, 2021

Published Online: Aug. 6, 2021

The Author Email: Hairong Wang (whairong@xjtu.edu.cn), Xin Ye (yehanwin@mail.ustc.edu.cn)

DOI:10.3788/LOP202158.1516026

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology