[1] Wu J T. Study on silicon-based solar cells with inverted pyramid structure and its mass production technology[D](2020).

[2] Zhao J H, Wang A H, Green M A. 24.5% efficiency silicon PERT cells on MCZ substrates and 24.7% efficiency PERL cells on FZ substrates[J]. Progress in Photovoltaics: Research and Applications, 7, 471-474(1999).

[3] Green M A. The path to 25% silicon solar cell efficiency: history of silicon cell evolution[J]. Progress in Photovoltaics: Research and Applications, 17, 183-189(2009).

[4] Deng Q W, Huang Y G, Zhu H L. Newest achievement of more than 25% conversion efficiency with crystalline silicon-base solar cell[J]. Laser & Optoelectronics Progress, 52, 110002(2015).

[5] Zeng X, Cui S Z, Jiang H W et al. Single-frequency upconverted laser generation by phase summation[J]. High Power Laser Science and Engineering, 11, e18(2023).

[6] Shen L Y, Li Y Y, Li W K et al. High temporal contrast 1053 nm laser source based on optical parametric amplification and second-harmonic generation[J]. High Power Laser Science and Engineering, 11, e1(2023).

[7] Shuai K, Liu X F, Zhao Y et al. Multilayer dielectric grating pillar-removal damage induced by a picosecond laser[J]. High Power Laser Science and Engineering, 10, e42(2022).

[8] Yu L P, Liang J H, Zeng Q H et al. High-power mid-infrared femtosecond master oscillator power amplifier Er∶ZBLAN fiber laser system[J]. High Power Laser Science and Engineering, 11, e53(2023).

[9] Dong Y Z, Jin Y X, Kong F Y et al. Angle amplifier in a 2D beam scanning system based on peristrophic multiplexed volume Bragg gratings[J]. High Power Laser Science and Engineering, 11, e13(2023).

[10] Wang Y, Yang L X, Liu Y P et al. Maskless inverted pyramid texturization of silicon[J]. Scientific Reports, 5, 10843(2015).

[11] Huang Z P, Geyer N, Werner P et al. Metal-assisted chemical etching of silicon: a review[J]. Advanced Materials, 23, 285-308(2011).

[12] Liu Y C, Dong K S, Bian L S et al. One-step fabrication of inverted pyramid textured silicon wafers via silver-assisted chemical etching combing with synergism of polyvinylpyrrolidone (PVP)[J]. Crystals, 11, 459(2021).

[13] Chen J. Preparation and properties of porous silicon based on metal-assisted chemical etching[D](2020).

[14] Dimitrov D Z, Du C H. Crystalline silicon solar cells with micro/nano texture[J]. Applied Surface Science, 266, 1-4(2013).

[15] Fan Y J, Han P D, Liang P et al. Differences in etching characteristics of TMAH and KOH on preparing inverted Pyramids for silicon solar cells[J]. Applied Surface Science, 264, 761-766(2013).

[16] Mavrokefalos A, Han S, Yerci S et al. Efficient light trapping in inverted nanopyramid thin crystalline silicon membranes for solar cell applications[J]. Nano Letters, 12, 2792-2796(2012).

[17] Gao Y[M]. Physics of solar cells, 149-150(2011).

[18] Bhattacharya S, John S. Beyond 30% conversion efficiency in silicon solar cells: a numerical demonstration[J]. Scientific Reports, 9, 12482(2019).

[19] Andreani L C, Bozzola A, Kowalczewski P et al. Silicon solar cells: toward the efficiency limits[J]. Advances in Physics: X, 4, 1548305(2019).

[20] Massiot I, Cattoni A, Collin S. Progress and prospects for ultrathin solar cells[J]. Nature Energy, 5, 959-972(2020).

[21] Yoo J. Reactive ion etching (RIE) technique for application in crystalline silicon solar cells[J]. Solar Energy, 84, 730-734(2010).

[22] Ding J N[M]. High efficiency crystalline silicon solar cell technology, 26-27(2019).

[23] Bhattacharya S, John S. Designing high-efficiency thin silicon solar cells using parabolic-pore photonic crystals[J]. Physical Review Applied, 9, 044009(2018).

[24] Zhao Y, Wang Z L, Zhang P et al. Application of finite difference method in simulation of solar cell[J]. Laser & Optoelectronics Progress, 53, 030401(2016).

[27] Chen K, Wu S, Zheng H M et al. Optimization analysis of dual-interface grating structures for thin film solar cells[J]. Laser & Optoelectronics Progress, 59, 0731001(2022).

[28] Granek F[M]. High-efficiency back-contact back-junction silicon solar cell, 15-16(2009).

[29] Van Kerschaver E, Beaucarne G. Back-contact solar cells: a review[J]. Progress in Photovoltaics: Research and Applications, 14, 107-123(2006).

[30] Rehman A U, Lee S H. Advancements in n-type base crystalline silicon solar cells and their emergence in the photovoltaic industry[J]. The Scientific World Journal, 2013, 470347(2013).

[31] Tang Q T, Yao H Y, Xu B B et al. Towards high-efficiency Al-BSF c-Si solar cell with both superior omnidirectional and electrical performance by modulating the tilt angle of quasi-periodic inverted pyramid arrays[J]. Solar Energy Materials and Solar Cells, 237, 111576(2022).

[32] Bozzola A, Kowalczewski P, Andreani L C. Towards high efficiency thin-film crystalline silicon solar cells: the roles of light trapping and non-radiative recombinations[J]. Journal of Applied Physics, 115, 094501(2014).

[33] Zhou H B, Xie Z M, Liu W F et al. Study of ultrathin and flexible black silicon solar cell[J]. Acta Energiae Solaris Sinica, 37, 2479-2483(2016).

[34] Gaucher A, Cattoni A, Dupuis C et al. Ultrathin epitaxial silicon solar cells with inverted nanopyramid arrays for efficient light trapping[J]. Nano Letters, 16, 5358-5364(2016).