APPLIED LASER, Volume. 44, Issue 11, 72(2024)

Study on the Mechanism of Picosecond Pulsed Laser Etching of Tantalum-Silicon Composite Dielectric Films

Jin Cong1, Wang Ziwen1, Wang Yutao2, Wang Li2, Zhang Luo1, He Zongtai1、*, and Liu Dun1
Author Affiliations
  • 1Laser Group, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, Hubei, China
  • 2Shanghai Key Laboratory of Laser Beam Micro Processing, Shanghai Institute of Laser Technology, Shanghai 200233, China
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    References(9)

    [9] [9] CHEN J L, LU X Z, WEN Q L, et al. Review on laser-induced etching processing technology for transparent hard and brittle materials[J]. The International Journal of Advanced Manufacturing Technology, 2021, 117(9): 2545-2564.

    [12] [12] JIN Y, PERRIE W, HARRIS P, et al. Patterning of Aluminium thin film on polyethylene terephthalate by multi-beam picosecond laser[J]. Optics and Lasers in Engineering, 2015, 74: 67-74.

    [13] [13] LI Z C, ZHANG D H, SU X, et al. Removal mechanism of surface cleaning on TA15 titanium alloy using nanosecond pulsed laser[J]. Optics Laser Technology, 2021, 139: 106998.

    [14] [14] HUANG L J, ZHANG G M, LI H, et al. Selective laser ablation and patterning on Ag thin films with width and depth control[J]. Journal of Materials Science: Materials in Electronics, 2020, 31(6): 4943-4955.

    [15] [15] NISHI N, OKAMOTO Y, OSHITA M, et al. Effects of pulse duration on removal characteristics of silver nanowire transparent conductive film by nanosecond pulsed laser[J]. Journal of Materials Processing Technology, 2017, 240: 255-261.

    [16] [16] TREMFELJ J , SMOLE F. Nanotechnology and nanoscience-from past breakthroughs to future prospects[J]. Informacije MIDEM-Journal of Microelectronics, Electronic Components and Materials, 2021,51(1): 25-48.

    [17] [17] RISCH A, HELLMANN R. Laser scribing of gallium doped zinc oxide thin films using picosecond laser[J]. Applied Surface Science, 2011, 258(5): 1849-1853.

    [18] [18] KE W C, BU X Z, OLIVEIRA J P, et al. Modeling and numerical study of keyhole-induced porosity formation in laser beam oscillating welding of 5A06 aluminum alloy[J]. Optics & Laser Technology, 2021, 133: 106540.

    [21] [21] KOSTYUK G K, ZAKOLDAEV R A, SERGEEV M M, et al. Laser-induced glass surface structuring by LIBBH technology[J]. Optical and Quantum Electronics, 2016, 48(4): 249.

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    Jin Cong, Wang Ziwen, Wang Yutao, Wang Li, Zhang Luo, He Zongtai, Liu Dun. Study on the Mechanism of Picosecond Pulsed Laser Etching of Tantalum-Silicon Composite Dielectric Films[J]. APPLIED LASER, 2024, 44(11): 72

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    Paper Information

    Received: Mar. 13, 2023

    Accepted: Mar. 11, 2025

    Published Online: Mar. 11, 2025

    The Author Email: Zongtai He (201910115@hbut.edu.cn)

    DOI:10.14128/j.cnki.al.20244411.072

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