APPLIED LASER, Volume. 44, Issue 11, 72(2024)
Study on the Mechanism of Picosecond Pulsed Laser Etching of Tantalum-Silicon Composite Dielectric Films
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Jin Cong, Wang Ziwen, Wang Yutao, Wang Li, Zhang Luo, He Zongtai, Liu Dun. Study on the Mechanism of Picosecond Pulsed Laser Etching of Tantalum-Silicon Composite Dielectric Films[J]. APPLIED LASER, 2024, 44(11): 72
Received: Mar. 13, 2023
Accepted: Mar. 11, 2025
Published Online: Mar. 11, 2025
The Author Email: Zongtai He (201910115@hbut.edu.cn)