Study on the Mechanism of Picosecond Pulsed Laser Etching of Tantalum-Silicon  Composite Dielectric Films

Jin Cong; Wang Ziwen; Wang Yutao; Wang Li; Zhang Luo; He Zongtai; Liu Dun

doi:10.14128/j.cnki.al.20244411.072

APPLIED LASER, Volume. 44, Issue 11, 72(2024)

Study on the Mechanism of Picosecond Pulsed Laser Etching of Tantalum-Silicon Composite Dielectric Films

Jin Cong¹, Wang Ziwen¹, Wang Yutao², Wang Li², Zhang Luo¹, He Zongtai^1、*, and Liu Dun¹

Author Affiliations

¹Laser Group, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, Hubei, China

²Shanghai Key Laboratory of Laser Beam Micro Processing, Shanghai Institute of Laser Technology, Shanghai 200233, China

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Jin Cong, Wang Ziwen, Wang Yutao, Wang Li, Zhang Luo, He Zongtai, Liu Dun. Study on the Mechanism of Picosecond Pulsed Laser Etching of Tantalum-Silicon Composite Dielectric Films[J]. APPLIED LASER, 2024, 44(11): 72

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Paper Information

Received: Mar. 13, 2023

Accepted: Mar. 11, 2025

Published Online: Mar. 11, 2025

The Author Email: Zongtai He (201910115@hbut.edu.cn)

DOI:10.14128/j.cnki.al.20244411.072

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology