Fig. 1. Wavefront distributions of four typical aberrations and test diagrams

Fig. 2. Variation of critical dimension with focus length of lines with different orientations under different aberrations. (a) Horizontal line; (b) vertical line; (c) critical dimension differences of horizontal and vertical lines

Fig. 3. Variation of critical dimension with focus length of short lines with different aberrations. (a) 1st line; (b) 5th line; (c) critical dimension differences of 1st and 5th lines

Fig. 4. Best focus length varying with pitch under different aberrations

Fig. 5. Critical dimensions of left and right ends of horizontal short line varying with focus length under different aberrations. (a) Left end; (b) right end; (c) difference of critical dimensions of left and right ends

Fig. 6. Critical dimension varying with focus length of test structure corresponding to Z₅ model. (a) Horizontal line; (b) vertical line

Fig. 7. Critical dimension varying with focus length of test structure corresponding to Z₇ model. (a) 1st line; (b) 2nd line

Fig. 8. Critical dimension varying with focus length of test structure corresponding to Z₁₀ model. (a) Left end of horizontal short line; (b) right end of horizontal short line