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Chinese Journal of Lasers, Volume. 47, Issue 7, 701023(2020)

Temperature Dependence of Wet Oxidation Process Based on VCSEL

Chen Lei, Luo Yan, Feng Yuan, Yan Changling, Fan Jie, Gao Xin, Zou Yonggang, and Hao Yongqin
Author Affiliations
  • State Key Laboratory of High Power Semiconductor Laser, Changchun University of Science and Technology,Changchun, Jilin 130022, China
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    Article index updated: Mar. 11, 2025

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    Chen Lei, Luo Yan, Feng Yuan, Yan Changling, Fan Jie, Gao Xin, Zou Yonggang, Hao Yongqin. Temperature Dependence of Wet Oxidation Process Based on VCSEL[J]. Chinese Journal of Lasers, 2020, 47(7): 701023

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    Paper Information

    Special Issue:

    Received: Dec. 4, 2019

    Accepted: --

    Published Online: Jul. 10, 2020

    The Author Email:

    DOI:10.3788/CJL202047.0701023

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology