[1] Lai F, Wang S X, He J H. Investigation on the innovation development strategy of microsystem technologies[J]. Microelectronics, 45, 81-87(2015).

[2] Sato T, Takaaki L, Jalabert H et al. Development of MEMS integrated into TEM setup to monitor shear deformation, force and stress for nanotribology[J]. Microelectronic Engineering, 112, 269-272(2013). http://dl.acm.org/citation.cfm?id=2533385

[3] Duan C, Jiang Y, Chen L et al. Design and development of MEMS capacitive large-scale strain sensors[J]. Integrated Ferroelectrics, 147, 123-130(2013). http://www.tandfonline.com/doi/abs/10.1080/10584587.2013.792226

[4] Lin J G, Cong Q, Xu C et al. Design of MEMS laser scanning retinal projection display system[J]. Acta Optica Sinica, 37, 1222001(2017).

[5] Lu A J, Bai Z C, Xiao W et al. Design and research of biosensor characteristics based on grating waveguide angle modulation with MEMS micro-mirror[J]. Chinese Journal of Lasers, 43, 0414001(2016).

[6] Hong L F, Zhang C X, Feng L S et al. Frequency tracking and locking methods in resonator micro-optic gyro[J]. Chinese Journal of Lasers, 38, 0905003(2011).

[7] Rivas J, Wunderlich R, Heinen S J. A MEMS acceleration sensor for traffic condition detection. [C]∥8th Conference on Ph. D. Research in Microelectronics and Electronics(PRIME), 12-15 June 2012, Aachen, Germany, Berlin: VDE, 321-324(2012).

[8] Choi W C, Choi H J. Development of a 3-D process technology for wafer-level packaging of MEMS devices[J]. IEEE Transactions on Components, Packaging and Manufacturing Technology, 2, 1442-1448(2012). http://ieeexplore.ieee.org/document/6255774/

[9] Zhong S L, Long L, Li M et al. Torsion-sensitive micro-electro mechanical systems accelerometer sensor based on optical fiber detection technology[J]. Chinese Journal of Lasers, 41, 0305002(2014).

[10] Feng X Z, Chen L J, Cheng J W. Application[J]. prospects of packaging technology of MEMS. Key Engineering Materials, 460/461, 274-279(2011).

[11] Fukuda Y, Tanaka T. MEMS and fiber optics sensor-based wearable interface for medical applications. [C]∥Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, 12-12 Oct. 2005, Waikoloa, HI, USA. [S. l.]: IEEE, 1675-1679(2005).

[12] Saperstein R E, Alic N, Zamek S et al. Processing advantages of linear chirped fiber Bragg gratings in the time domain realization of optical frequency-domain reflectometry[J]. Optics Express, 15, 15464-15479(2007). http://www.ncbi.nlm.nih.gov/pubmed/19550832

[13] Wang H R, Gao R X, Yin Y X et al. Vibration sensor based on single mode-multimode optic-fiber cantilever structure[J]. Laser & Optoelectronics Progress, 53, 060601(2016).

[14] Huo D H. The research and application of fiber optic accelerometer system[D]. Jinan: Shandong University, 4-8(2009).

[15] Alberto V, Casalicchio M L, Perrone G. Displacement and acceleration measurement in vibration test using a fiber optic sensor[J]. IEEE Transactions on Instrumentation and Measurement, 59, 1389-1396(2010). http://ieeexplore.ieee.org/document/5427017/

[16] Gunther S, Seiler F. Unidirectional fiber optic sensor for angular acceleration measurement[J]. Optics Letters, 38, 1500-1502(2013). http://www.ams.org/mathscinet-getitem?mr=823706

[17] Li J L, Chen T. A novel fiber optic intensity modulated acceleration sensor[J]. Computer Measurement and Control, 21, 2882-2884(2013).

[18] Qi X L, Wang F J, Cai Z G et al. Study on the intensity distribution of the output beam of multimode optical fiber[J]. Semiconductor Optoelectronics, 24, 117-121(2003).

[19] Li A Y, Wang X Y. Studying on optical field properties of fiber coupled LD[J]. Acta Photonica Sinica, 36, 1664-1667(2007).