Fig. 1. Schematic of MEMS optical fiber acceleration sensor

Fig. 2. Schematic of the overlapped surface of receiving optical fiber

Fig. 3. (a) Diagram of Gaussian beam transmission; (b) mode field distribution on x-z plane

Fig. 4. Schematic of optical transmission

Fig. 5. Cross section of receiving optical fiber mode field on x-z plane. (a1) (a2) Δd=0 μm; (b1) (b2) Δd=2.5 μm; (c1) (c2) Δd=5 μm; (d1) (d2) Δd=7.5 μm; (e1) (e2) Δd=10 μm

Fig. 6. Relationship between light power of receiving optical fiber and shade displacement

Fig. 7. Simulation diagrams of deformations of silicon rectangular beam under different accelerations. (a) a=40 m·s-2; (b) a=80 m·s-2; (c) a=120 m·s-2

Fig. 8. Fitting curve of the deflection of silicon rectangular beam as a function of acceleration

Fig. 9. Fitting curve of light power difference and acceleration of the system

Fig. 10. Structural schematic of platform vibrator

Fig. 11. Frequency response characteristic curve of fiber acceleration sensor

Fig. 12. Fitting curve of fiber acceleration sensor detective value and standard acceleration value