Fig. 1. Schematic of single-frequency laser interferometry

Fig. 2. Interference signal detector based on QD and integrated wave plate array

Fig. 3. Schematic of interference signal detection based on QD and integrated wave plate array

Fig. 4. Schematic of wave plate alignment error

Fig. 5. Experiment on nonlinear errors induced by alignment errors of wave plates

Fig. 6. Rotating device of wave plate

Fig. 7. Simulation and experimental results of errors introduced by LS2. (a)(b) Simulation results; (c)(d) experimental results

Fig. 8. Simulation and experimental results of errors introduced by LS4. (a)(b) Simulation results; (c)(d) experimental results

Fig. 9. Experimental results of errors introduced by LS3. (a) Orthogonality; (b) error