Effect of Alignment Error of Wave Plate Array on Nonlinear Error of Laser Interference

Bo Zhang; Liping Yan; Xiaofei Diao

doi:10.3788/CJL202249.0904003

Chinese Journal of Lasers, Volume. 49, Issue 9, 0904003(2022)

Effect of Alignment Error of Wave Plate Array on Nonlinear Error of Laser Interference

Bo Zhang¹, Liping Yan¹, and Xiaofei Diao^2、*

Author Affiliations

¹Laboratory of Nanometer Measurement Technology, Zhejiang Sci-Tech University, Hangzhou 310018, Zhejiang , China

²Division of Dimensional Metrology, National Institute of Metrology, Beijing 100029, China

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Bo Zhang, Liping Yan, Xiaofei Diao. Effect of Alignment Error of Wave Plate Array on Nonlinear Error of Laser Interference[J]. Chinese Journal of Lasers, 2022, 49(9): 0904003

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Paper Information

Category: Measurement and metrology

Received: Aug. 24, 2021

Accepted: Oct. 13, 2021

Published Online: Mar. 3, 2022

The Author Email: Diao Xiaofei (diaoxiaofei@163.com)

DOI:10.3788/CJL202249.0904003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology