Acta Optica Sinica, Volume. 32, Issue 6, 629003(2012)

Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions

Gong Lei1、*, Wu Zhensen2, and Gao Ming1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(11)

    [1] [1] Gong Lei, Wu Zhensen. Analysis of light scattering about slightly non-spherical nanoparticles on wafers[J]. Chinese J. Lasers, 2011, 38(1): 0110001

    [3] [3] J. Kim, S. Ehrman, G. Mulholland et al.. Polarized light scattering by dielectric and metallic spheres on silicon wafers[J]. Appl. Opt., 2002, 41(25): 5405~5412

    [4] [4] J. Kim, S. Ehrman, G. Mulholland et al.. Polarized light scattering by dielectric and metallic spheres on oxidized silicon surfaces[J]. Appl. Opt., 2004, 43(3): 585~591

    [5] [5] T. Lindstrm, D. Rnnow. Total integrated scattering from transparent substrates in the infrared region: validity of scalar theory[J]. Opt. Eng., 2000, 39(2): 478~487

    [7] [7] Cao Kai, Cheng Zhaogu, Gao Haijun. Calculation of light scattering from a spherical particle on a silicon wafer[J]. Acta Photonica Sinica, 2006, 35(4): 517~520

    [9] [9] P. B. Wong, G. L. Tyler, J. E. Baron et al.. A three-wave FDTD approach to surface scattering with applications to remote sensing of geophysical surfaces[J]. IEEE Trans. AP., 1996, 44(4): 504~514

    [10] [10] J. Y. Fang, Z. H. Wu. Generalized perfectly matched layer for the absorption of propagating and evanescent waves in lossless and lossy media[J]. IEEE Trans. AP., 1996, 44(12): 2216~2222

    [11] [11] K. Demarest, Z. B. Huang, R. Plumb. An FDTD near- to far-zone transformation for scatterers buried in stratified grounds[J]. IEEE Trans. AP., 1996, 44(8): 1150~1157

    CLP Journals

    [1] GONG Lei, WU Zhen, GAO Ming, WANG Li, LI Ya, WANG Qian. Scattering Angle Distribution of Redundant Particles Inlaid Optical Dielectric Films[J]. Acta Photonica Sinica, 2019, 48(3): 329001

    [2] GONG Lei, WU Zhen-sen, PAN Yong-qiang. The Diagnosis of Rayleigh Defect Particle Position by Light Scattering Character on the Optical Surface[J]. Acta Photonica Sinica, 2014, 43(8): 831003

    [3] Gong Lei, Wu Zhensen, Dai Shaoyu, Li Zhengjun. Study on Difference Field Scattering Properties between Slightly Rough Optical Surface and above Redundant Particles[J]. Acta Optica Sinica, 2015, 35(8): 829001

    [4] Gong Lei, Wu Zhensen, Li Zhengjun, Bai Lu, Gao Ming. Analysis of Radiation Forces Exerted on Defect Particle on the Wafer by a Laser Beam[J]. Chinese Journal of Lasers, 2013, 40(2): 203009

    [5] Gong Lei, Wu Zhensen, Ge Chengxian, Gao Ming, Pan Yongqiang. Composite Light Scattering Properties Between Slightly Rough OpticalSurface and Multi-Body Particles[J]. Chinese Journal of Lasers, 2016, 43(12): 1203001

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    Gong Lei, Wu Zhensen, Gao Ming. Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions[J]. Acta Optica Sinica, 2012, 32(6): 629003

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    Paper Information

    Category: Scattering

    Received: Dec. 28, 2011

    Accepted: --

    Published Online: May. 16, 2012

    The Author Email: Lei Gong (zzgonglei@126.com)

    DOI:10.3788/aos201232.0629003

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