Acta Optica Sinica, Volume. 32, Issue 6, 629003(2012)

Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions

Gong Lei1、*, Wu Zhensen2, and Gao Ming1
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    Gong Lei, Wu Zhensen, Gao Ming. Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions[J]. Acta Optica Sinica, 2012, 32(6): 629003

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    Paper Information

    Category: Scattering

    Received: Dec. 28, 2011

    Accepted: --

    Published Online: May. 16, 2012

    The Author Email: Lei Gong (zzgonglei@126.com)

    DOI:10.3788/aos201232.0629003

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