Fig. 1. Schematic of beam homogenizing based on lens array

Fig. 2. Schematic of line beam shaping system

Fig. 3. Structure of laser transmitting arm

Fig. 4. Photograph of long axis lens array

Fig. 5. (a) Mechanical structure and (b) optical structure of lens

Fig. 6. (a) Energy distribution curve of long axis; (b) energy distribution curve of short axis; (c) simulated spot

Fig. 7. Simulated long axis energy distributions of line spots. (a) Energy distribution without center error; (b) energy distribution with center error in the range of [-0.1 mm, 0.1 mm]; (c) energy distribution with center error in the range of [-0.3 mm, 0.3 mm]; (d) energy distribution with center error in the range of [-0.5 mm, 0.5 mm]

Fig. 8. Relationship between center error of long axis lens array and size of line spot

Fig. 9. Simulated short axis energy distributions of line spots. (a) Energy distribution with actual working plane deviation of -2 mm; (b) energy distribution with actual working plane deviation of -1 mm; (c) energy distribution without deviation; (d) energy distribution with actual working plane deviation of 1 mm; (e) energy distribution with actual working plane deviation of 2 mm

Fig. 10. Relationship among deviation of actual working plane, spot size of short axis and energy density

Fig. 11. Photographs of line spots on different materials. (a) Line spot on heat-sensitive photo paper; (b) partial line spot on heat-sensitive photo paper under optical microscope; (c) partial line spot on oxidized and blackened aluminum under optical microscope

Fig. 12. Schematic of major structure of beam analyzer

Fig. 13. (a) Measured partial line spot; (b) energy distribution of long axis; (c) energy distribution of short axis

Fig. 14. SEM images and XRD spectra of amorphous silicon before and after annealing process by line beam. (a) XRD spectrum before annealing process; (b) XRD spectrum after annealing process; (c) SEM image before annealing process; (d) SEM image after annealing process