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Chinese Journal of Lasers, Volume. 44, Issue 9, 906002(2017)

Line Beam Shaping System for Preparation of Low Temperature Poly-Silicon

Yin Guangyue1,2、*, You Libing1, Wang Qingsheng1, Chu Zhuangzhuang1,2, Chen Liang1,2, and Fang Xiaodong1,2
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    Article index updated: Mar. 10, 2025

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    Yin Guangyue, You Libing, Wang Qingsheng, Chu Zhuangzhuang, Chen Liang, Fang Xiaodong. Line Beam Shaping System for Preparation of Low Temperature Poly-Silicon[J]. Chinese Journal of Lasers, 2017, 44(9): 906002

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    Paper Information

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    Received: Mar. 29, 2017

    Accepted: --

    Published Online: Sep. 7, 2017

    The Author Email: Guangyue Yin (378575080@qq.com)

    DOI:10.3788/CJL201744.0906002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology