Laser & Optoelectronics Progress, Volume. 56, Issue 16, 163201(2019)

Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation

Zihan Wang1, Baoxu Wang1, Masaru Kamano2, and Weiwei Xu2、*
Author Affiliations
  • 1 State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, China
  • 2 National Institute of Technology, Anan College, Anan, 7740017, Japan
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    Zihan Wang, Baoxu Wang, Masaru Kamano, Weiwei Xu. Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation[J]. Laser & Optoelectronics Progress, 2019, 56(16): 163201

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    Paper Information

    Category: Ultrafast Optics

    Received: Feb. 14, 2019

    Accepted: Mar. 27, 2019

    Published Online: Aug. 5, 2019

    The Author Email: Weiwei Xu (xu0611318weiwei@163.com)

    DOI:10.3788/LOP56.163201

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